Repositório Digital

A- A A+

Range and thermal behavior studies of Au and Bi implanted into photoresist films

.

Range and thermal behavior studies of Au and Bi implanted into photoresist films

Mostrar registro completo

Estatísticas

Título Range and thermal behavior studies of Au and Bi implanted into photoresist films
Autor Behar, Moni
Grande, Pedro Luis
Amaral, Livio
Kaschny, Jorge Ricardo de Araujo
Zawislak, Fernando Claudio
Guimaraes, Renato Bastos
Biersack, J.P.
Fink, Dietmar
Abstract The Rutherford backscattering technique has been used to determine range parameters of Au and Bi íons implanted into AZ1350 photoresist films at energies from 20 to 300 keV. The experimental results are 20 to 25% higher than the theoretical predictions by Ziegler, Biersack, and Littmark. Good agreement is achieved only when inelastic etrects are included in the nuclear stopping-power regime. In addition, we find that shallow implantation of Bi íons increases the temperature at which the photoresist starts to decompose. This feature is not observed when Au is implanted under the same conditions. Finally, we have studied the thermal behavior of implanted Bi and Au ions. While Bi diffuses regularly, Au does not follow an Arrhenius kind of behavior. In addition, it is shown that the implantation process modifies, via the nonannealed damage, the characteristics of the Bi diffusion behavior.
Contido em Physical review. B, Condensed matter. New York. Vol. 41, no. 10 pt. A (Apr. 1990), p. 6145-6153
Assunto Implantacao de ions
Origem Estrangeiro
Tipo Artigo de periódico
URI http://hdl.handle.net/10183/103596
Arquivos Descrição Formato
000015083.pdf (452.8Kb) Texto completo (inglês) Adobe PDF Visualizar/abrir

Este item está licenciado na Creative Commons License

Este item aparece na(s) seguinte(s) coleção(ões)


Mostrar registro completo

Percorrer



  • O autor é titular dos direitos autorais dos documentos disponíveis neste repositório e é vedada, nos termos da lei, a comercialização de qualquer espécie sem sua autorização prévia.
    Projeto gráfico elaborado pelo Caixola - Clube de Criação Fabico/UFRGS Powered by DSpace software, Version 1.8.1.