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Lithium implantation at low temperature in silicon for sharp buried amorphous layer formation and defect engineering

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Lithium implantation at low temperature in silicon for sharp buried amorphous layer formation and defect engineering

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Título Lithium implantation at low temperature in silicon for sharp buried amorphous layer formation and defect engineering
Autor Oliviero, Erwan Marie Hubert
David, Marie-Laure
Fichtner, Paulo Fernando Papaleo
Beaufort, Marie France
Barbot, Jean François
Abstract The crystalline-to-amorphous transformation induced by lithium ion implantation at low temperature has been investigated. The resulting damage structure and its thermal evolution have been studied by a combination of Rutherford backscattering spectroscopy channelling (RBS/C) and cross sectional transmission electron microscopy (XTEM). Lithium low-fluence implantation at liquid nitrogen temperature is shown to produce a three layers structure: an amorphous layer surrounded by two highly damaged layers. A thermal treatment at 400 C leads to the formation of a sharp amorphous/crystalline interfacial transition and defect annihilation of the front heavily damaged layer. After 600 C annealing, complete recrystallization takes place and no extended defects are left. Anomalous recrystallization rate is observed with different motion velocities of the a/c interfaces and is ascribed to lithium acting as a surfactant. Moreover, the sharp buried amorphous layer is shown to be an efficient sink for interstitials impeding interstitial supersaturation and {311} defect formation in case of subsequent neon implantation. This study shows that lithium implantation at liquid nitrogen temperature can be suitable to form a sharp buried amorphous layer with a well-defined crystalline front layer, thus having potential applications for defects engineering in the improvement of post-implantation layers quality and for shallow junction formation.
Contido em Journal of applied physics. Melville, NY. Vol. 113, no. 8 (Feb. 2013), p. 083515-1 a 083515-7
Assunto Lítio
Recristalização (Metalurgia)
Origem Estrangeiro
Tipo Artigo de periódico
URI http://hdl.handle.net/10183/117970
Arquivos Descrição Formato
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