Repositório Digital

A- A A+

Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si

.

Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si

Mostrar registro completo

Estatísticas

Título Role of fluorine in suppressing boron transient enhanced diffusion in preamorphized Si
Autor Impellizzeri, Giuliana
Santos, Jose Henrique Rodrigues dos
Mirabella, Salvatore
Priolo, Francesco
Napolitani, Enrico
Carnera, Alberto
Abstract We have explained the role of fluorine in the reduction of the self-interstitial population in a preamorphized Si layer under thermal treatment. For this purpose, we have employed a B spike layer grown by molecular-beam epitaxy as a marker for the self-interstitial local concentration. The amorphized samples were implanted with 731012, 731013, or 431014 F/cm2 at 100 keV, and afterwards recrystallized by solid phase epitaxy. Thermal anneals at 750 or 850 °C were performed in order to induce the release of self-interstitials from the end-of-range (EOR) defects and thus provoke the transient enhanced diffusion of B atoms. We have shown that the incorporation of F reduces the B enhanced diffusion in a controlled way, up to its complete suppression. It is seen that no direct interaction between B and F occurs, whereas the suppression of B enhanced diffusion is related to the F ability in reducing the excess of silicon self-interstitials emitted by the EOR source. These results are reported and discussed.
Contido em Applied physics letters. Vol. 84, no. 11 (Mar. 2004), p. 1862-1864
Assunto Boro
Difusao
Fluor
Intersticiais
Ligacoes quimicas
Recristalizacao
Semicondutores elementares
Silicio
Origem Estrangeiro
Tipo Artigo de periódico
URI http://hdl.handle.net/10183/141227
Arquivos Descrição Formato
000413283.pdf (410.7Kb) Texto completo (inglês) Adobe PDF Visualizar/abrir

Este item está licenciado na Creative Commons License

Este item aparece na(s) seguinte(s) coleção(ões)


Mostrar registro completo

Percorrer



  • O autor é titular dos direitos autorais dos documentos disponíveis neste repositório e é vedada, nos termos da lei, a comercialização de qualquer espécie sem sua autorização prévia.
    Projeto gráfico elaborado pelo Caixola - Clube de Criação Fabico/UFRGS Powered by DSpace software, Version 1.8.1.