High resolution profiling using ion scattering and resonant nuclear reactions

dc.contributor.author	Pezzi, Rafael Peretti	pt_BR
dc.contributor.author	Wallace, Robert M.	pt_BR
dc.contributor.author	Copel, Matthew	pt_BR
dc.contributor.author	Baumvol, Israel Jacob Rabin	pt_BR
dc.date.accessioned	2016-07-27T02:18:00Z	pt_BR
dc.date.issued	2005	pt_BR
dc.identifier.uri	http://hdl.handle.net/10183/144010	pt_BR
dc.format.mimetype	application/pdf
dc.language.iso	eng	pt_BR
dc.relation.ispartof	AIP conference proceedings. New York	pt_BR
dc.rights	Open Access	en
dc.subject	Circuitos integrados	pt_BR
dc.subject	Depth profiling	en
dc.subject	Eletrônica	pt_BR
dc.subject	Medium energy ion scattering	en
dc.subject	Resonant nuclear reaction analysis	en
dc.title	High resolution profiling using ion scattering and resonant nuclear reactions	pt_BR
dc.type	Trabalho completo publicado em evento	pt_BR
dc.contributor.event	Characterizations and Metrology for ULSI Technology ( 2005 : Richardson, Texas)	pt_BR
dc.identifier.nrb	000560098	pt_BR
dc.type.origin	Estrangeiro	pt_BR

Este item está licenciado na Creative Commons License