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    • Ion beam synthesis of cubic-SiC layer on Si(111) substrate 

      Maltez, Rogério Luis; Oliveira, Roana Melina de; Reis, Roberto Moreno Souza dos; Boudinov, Henri Ivanov (2006) [Journal article]
      We have investigated SiC layers produced by ion beam synthesis on Si (111) substrates using different procedures. Bare Si (111) and SiO2/Si (111) structures were implanted with carbon at 40 keV up to a fluence of 4 1017 ...