Navegação Ciências Exatas e da Terra por Assunto "Oxido nitroso"
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Isotopic tracing during rapid thermal growth of silicon oxynitride films on Si in O2, NH3, and N2O
(1997) [Artigo de periódico]We performed isotopic tracing of O, N, and H during rapid thermal growth of silicon oxynitride films on silicon in two different sequential, synergistic gas environments: O2, followed by NH3, then followed by N2O; and N2O, ...