Navegação Ciências Exatas e da Terra por Autor "Mäder, M."
Resultados 1-1 de 1
-
Competing influence of damage buildup and lattice vibrations on ion range profiles in Si
Posselt, Matthias; Mäder, M.; Grötzschel, Rainer; Behar, Moni (2003) [Artigo de periódico]Phosphorus depth profiles in Si obtained by 140 keV implantation in the [001] axial channel direction and in a direction 7° off axis are investigated at two different doses (531013 and 5 31015 cm22) for implantation ...