Now showing items 1-3 of 3

    • Hydrogen trapping in oxigen-deficient hafnium silicates 

      Fonseca, Leonardo R. C.; Xavier Jr., A. L.; Ribeiro Jr., Marcelo; Driemeier, Carlos Eduardo; Baumvol, Israel Jacob Rabin (2007) [Journal article]
      Isotopic substitution, nuclear reaction analysis, and x-ray photoelectron spectroscopy were employed to show that oxygen-deficient hafnium (Hf) silicates trap hydrogen atoms. Based on this experimental observation, we used ...
    • Reduction of hafnium oxide and hafnium silicate by rhenium and platinum 

      Copel, Matthew; Pezzi, Rafael Peretti; Neumayer, Deborah; Jamison, Paul (2006) [Journal article]
      We report chemical interactions of Hf-based dielectrics with Re and Pt overlayers during annealing. Reduction of the Hf to a suboxide is observed by x-ray photoelectron spectroscopy, along with a decrease in total oxygen ...
    • Stabilization of higher-k tetragonal HfO/sub 2/ by SiO/sub 2/ admixture enabling thermally stable metal-insulator-metal capacitors 

      Böscke, Tim S.; Govindarajan, Shrinivas; Kirsch, Paul D.; Hung, Puiyee Y.; Krug, Cristiano; Lee, Byoung Hun; Heitmann, Johannes; Schröder, Uwe; Pant, Gaurang; Gnade, Bruce E.; Krautschneider, Wolfgang (2007) [Journal article]
      The authors report the relationship between HfO2 crystalline phase and the resulting electrical properties. Crystallization of amorphous HfO2 into the monoclinic phase led to a significant increase in leakage current and ...