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    • On the microstructure of Si coimplanted with H+ and He+ ions at moderate energies 

      Reboh, Shay; Silva, Fernando Schaurich; Declemy, Alain; Barbot, Jean François; Beaufort, Marie France; Cherkashin, Nikolay; Fichtner, Paulo Fernando Papaleo (2010) [Journal article]
      We report on the microstructure of silicon coimplanted with hydrogen and helium ions at moderate energies. X-ray diffraction investigations in as-implanted samples show the direct correlation between the lattice strain and ...